The HE-960LC is a panel-mount low-concentration conductivity meter from HORIBA's semiconductor wet process lineup, designed for chemical recovery and ultrapure water recycling in semiconductor and FPD manufacturing processes. It uses chemically resistant 2-electrode flow-through carbon sensors (metal-free), measuring conductivity up to 1000 μS/cm (cell constant 0.1 /cm) or 10000 μS/cm (cell constant 1.0 /cm). A built-in concentration conversion function accepts user-defined relationships between chemical concentration, conductivity, and temperature — making it particularly suitable for dilution management of low-concentration chemicals. Powered by 24 V DC; RS-485 communication included.
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HE-960LC, Carbon Sensor Conductivity Meter, Low Concentration Type, HORIBA
HE-960LC
Horiba
The HE-960LC is a panel-mount low-concentration conductivity meter from HORIBA's semiconductor wet process lineup, intended for chemical recovery monitoring and ultrapure water recycling in semiconductor and FPD (Flat Panel Display) manufacturing processes. It employs chemically resistant 2-electrode flow-through carbon sensors — fully metal-free — that are compatible with the aggressive chemicals used in semiconductor cleaning and etching processes without risk of metal contamination. A built-in concentration conversion function allows the user to input the relationship between chemical concentration, conductivity, and temperature characteristics, enabling direct readout of chemical concentration rather than raw conductivity — particularly valuable for dilution management of low-concentration process chemicals. The 96 × 96 mm DIN format, 24 V DC power supply, and RS-485 communication make the HE-960LC easy to integrate into semiconductor fab automation systems.
Key Features HE-960LC
- Metal-free flow-through carbon sensors — chemically resistant, compatible with aggressive semiconductor process chemicals, no metal contamination risk.
- Measurement range up to 1000 μS/cm (cell const. 0.1 /cm) or 10000 μS/cm (cell const. 1.0 /cm).
- User-defined concentration conversion: input the conductivity–concentration–temperature relationship for any single-component chemical — direct concentration readout for dilution management.
- 24 V DC power supply — straightforward integration into semiconductor fab power infrastructure.
- RS-485 communication for SCADA/fab automation integration.
- Transmission output and contact output for process control and alarm functions.
- 96 × 96 mm DIN panel-mount format; compact and cost-effective installation.
Applications
The HE-960LC is suited to chemical concentration monitoring and dilution management in semiconductor wet cleaning processes, chemical recovery and recycling line monitoring, ultrapure water rinse monitoring, and FPD manufacturing process chemical management — wherever metal-free measurement of low-concentration chemicals is required.
Installation and Safety Notes
Install into a standard 96 × 96 mm panel cutout. Power: 24 V DC. Use only with compatible flow-through carbon sensors. Detailed wiring, output, and installation specifications are provided in the product catalog — consult the HE-960LC catalog for full technical data.
Technical Specifications
| Parameter | Conductivity, Concentration, Temperature |
| Measurement method | 2-electrode (flow-through carbon sensor) |
| Conductivity range (cell const. 0.1 /cm) | 0–1000 μS/cm (raw conductivity) |
| Conductivity range (cell const. 1.0 /cm) | 0–10000 μS/cm (raw conductivity): 0–2000 μS/cm / 2000–10000 μS/cm |
| Temperature range | 0–100 °C |
| Repeatability (conductivity) | ±0.5% FS across all ranges |
| Repeatability (temperature) | ±0.5 °C |
| Concentration conversion | User-defined (conductivity–concentration–temperature relationship; single-component chemicals) |
| Transmission output | Available (details in catalog) |
| Contact output | Available (details in catalog) |
| Communication | RS-485 |
| Power supply | 24 V DC |
| Installation type | Panel-mount (DIN 96×96 mm) |
| Manufacturer | HORIBA Advanced Techno Co., Ltd. |
| Brand | Horiba |
