The HE-480C-GC is a panel-mount low-concentration conductivity meter from HORIBA's semiconductor wet process lineup, designed for chemical measurement in semiconductor wet processes. It uses special carbon-electrode sensors (metal-free) that eliminate the risk of metal contamination in ultrapure water rinse lines and aggressive chemical circulation systems. Compatible with ESH-01-L-GC5 (cell constant 0.1 /cm, up to 999.9 μS/cm) and ESH-1-L-GC9 (cell constant 1.0 /cm, up to 9999 μS/cm) sensors, it is ideal for concentration management during processes, chemical dilution management, and ultrapure water recycling monitoring.
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HE-480C-GC, Carbon Sensor Conductivity Meter, Low Concentration Type, HORIBA
HE-480C-GC
Horiba
The HE-480C-GC is a panel-mount low-concentration conductivity meter from HORIBA, purpose-built for chemical measurement in semiconductor wet processes. Its defining feature is the use of special carbon-electrode conductivity sensors in place of conventional metal electrodes, completely eliminating the risk of metal contamination in ultrapure water rinse monitoring and chemical circulation lines. Compatible sensors — ESH-01-L-GC5 (cell constant 0.1 /cm) and ESH-1-L-GC9 (cell constant 1.0 /cm) — combine excellent chemical resistance and pressure resistance with contamination-free operation. The instrument offers abundant temperature compensation options tailored to the specific liquid being measured, including a dedicated ultrapure water mode (reference temperature 25 °C), NaCl temperature characteristics, and user-defined temperature coefficients.
Key Features HE-480C-GC
- Metal-free carbon electrode sensors — eliminates metal contamination risk in ultrapure water and aggressive chemical process lines.
- Excellent chemical resistance and pressure resistance — suitable for chemical baths, rinse lines, and circulation systems in semiconductor wet processes.
- Compatible with ESH-01-L-GC5 (cell const. 0.1 /cm, up to 999.9 μS/cm) and ESH-1-L-GC9 (cell const. 1.0 /cm, up to 9999 μS/cm).
- Abundant temperature compensation: ultrapure water characteristics (ref. 25 °C), NaCl characteristics, or user-defined temperature coefficient — selectable per liquid type.
- Transmission output and contact output for process integration and alarm functions.
- Automatic calibration function.
- Power supply 100–240 V AC; CE marked; FCC Part 15.
Applications
The HE-480C-GC is suited to conductivity and concentration monitoring in semiconductor wet processes: process concentration management during chemical treatment steps, chemical dilution verification, ultrapure water recycling and rinse monitoring, and any application where metal-free measurement in aggressive or ultrapure chemical environments is required.
Installation and Safety Notes
Install in a panel configuration. Use only with the compatible ESH-GC Series carbon-electrode sensors. Ensure sensor and cable compatibility with the specific chemicals and process conditions. Detailed installation and wiring specifications are provided in the product catalog — consult the HE-480C-GC catalog for full technical data.
Technical Specifications
| Parameter | Conductivity, Temperature |
| Measurement method | 2-electrode (carbon sensor) |
| Compatible sensors | ESH-01-L-GC5 (cell const. 0.1 /cm); ESH-1-L-GC9 (cell const. 1.0 /cm) |
| Conductivity range (cell const. 0.1 /cm) | 0.00–20.00 μS/cm / 0.0–200.0 μS/cm / 20.00–70.00 μS/cm / 200.0–999.9 μS/cm |
| Conductivity range (cell const. 1.0 /cm) | 0.0–200.0 μS/cm / 0–2000 μS/cm / 200.0–700.0 μS/cm / 2000–9999 μS/cm |
| Repeatability | Within ±0.5% FS (main ranges); within ±1.0% FS (extended ranges) |
| Temperature compensation | Ultrapure water (ref. 25 °C); NaCl; arbitrary temperature coefficient |
| Transmission output | Available (details in catalog) |
| Contact output | Available (details in catalog) |
| Calibration | Automatic calibration |
| Power supply | 100–240 V AC |
| Installation type | Panel-mount |
| Compliance | CE marked; FCC Part 15 |
| Manufacturer | HORIBA Advanced Techno Co., Ltd. |
| Brand | Horiba |
