HE-960RW-GC(W), 2-Channel Carbon Sensor Resistivity Meter for Ultrapure Water Management, HORIBA

The HE-960RW-GC(W) is a 2-channel carbon sensor resistivity meter from HORIBA's semiconductor wet process lineup, enabling simultaneous resistivity monitoring at two process locations with a single transmitter. It uses ERF-series GC sensors with 100% carbon electrodes — completely metal-free — making it fully compatible with aggressive cleaning chemicals including hydrofluoric acid (HF) and hydrogen peroxide (H₂O₂), where conventional metal-electrode sensors pose a contamination risk. Connecting two sensors to one 96 × 96 mm DIN panel-mount unit reduces panel space, wiring complexity, and cost compared to two single-channel instruments, while delivering independent, accurate simultaneous measurement outputs for both channels. RS-485 communication supports integration into semiconductor fab automation and SCADA systems.

Key Features HE-960RW-GC(W)

• 2-channel simultaneous measurement — two ERF-series GC sensors connected to one transmitter; independent, accurate resistivity output for each channel.
• 100% carbon GC electrodes — completely metal-free; compatible with HF, H₂O₂, and a wide range of semiconductor cleaning solutions.
• Resistivity range 0.00–2.00 / 0.00–20.00 / 0.0–100.0 MΩ·cm per channel.
• RS-485 communication for integration into semiconductor fab automation systems.
• Transmission output and contact output for process control and alarm functions.
• 24 V DC, 10 W max — native semiconductor fab DC power infrastructure.
• 96 × 96 mm DIN panel-mount; panel face IP65; rear case IP20; terminals IP00; approx. 550 g.
• CE marked; FCC Part 15.

Applications

The HE-960RW-GC(W) is suited to simultaneous dual-point resistivity monitoring in semiconductor ultrapure water management systems, cleaning bath and rinse water monitoring in one-bath and multi-bath cleaning processes, and any application requiring metal-free 2-channel resistivity measurement in aggressive chemical environments where a single compact transmitter is preferred.

Installation and Safety Notes

Install into a standard 96 × 96 mm panel cutout. Power: 24 V DC, 10 W max. Use only with compatible ERF-series GC carbon sensors. Panel face IP65; rear case IP20; terminals IP00. Operating temperature −5 to 45 °C; humidity 20–85% RH non-condensing. Consult the product catalog for full wiring and installation specifications.

Technical Specifications