The HE-200R is HORIBA's field-installation type electric resistivity meter from the H-1 Series, designed for continuous monitoring of resistivity and temperature in ultrapure water (UPW) systems, semiconductor process water, and pharmaceutical pure water. Combined with the ERF-001 Series 2-electrode resistivity sensors (cell constant 0.01 /cm), it measures resistivity from 0.000 MΩ·cm to 20.00 MΩ·cm (or 0.00 to 200.0 kΩ·cm), with a highly responsive temperature sensor that minimises measurement fluctuations during sudden changes in water temperature. Two isolated 4–20 mA outputs, three relay contacts, RS-485, and IP65 aluminium housing round out the feature set.
On order
HE-200R, Field-Installation Type Electric Resistivity Meter, HORIBA
HE-200R
Horiba
The HE-200R is a field-installation type electric resistivity meter from HORIBA's H-1 Series, designed for accurate continuous monitoring of resistivity in ultrapure water systems, semiconductor process water, and pharmaceutical pure water loops. Combined with the ERF-001 Series 2-electrode resistivity sensors (cell constant 0.01 /cm), it measures resistivity across ranges from sub-kΩ·cm to 20.00 MΩ·cm. A highly responsive temperature sensor minimises fluctuation in measured values during sudden changes in water temperature, and a dedicated UPW standard resistivity input (18.23 MΩ·cm standard, with 18.18 and 18.24 MΩ·cm alternatives) supports calibration against recognised ultrapure water standards. A clipping function holds the displayed value at a user-defined ceiling when the measured resistivity exceeds it. Calibration services for converter and sensor combinations are available as an option.
Key Features HE-200R
- Resistivity measurement 0.000–20.00 MΩ·cm / 0.00–200.0 kΩ·cm; without temperature compensation: 0.0–100.0 MΩ·cm display available.
- Highly responsive Pt 1 kΩ temperature sensor — minimises measurement error during sudden water temperature changes.
- UPW standard resistivity input: selectable from 18.23 MΩ·cm (standard), 18.18 MΩ·cm, 18.24 MΩ·cm, 182.3 kΩ·m (standard), 181.8 kΩ·m, or 182.4 kΩ·m.
- Clipping function: holds measured value at user-defined ceiling when exceeded.
- Temperature compensation: NaCl characteristic, arbitrary coefficient (±3%/°C, ref. 5–95 °C), or none; automatic pure water compensation in deionised water range.
- Two isolated 4–20 mA DC outputs (max. 900 Ω): output 1 for resistivity (free range), output 2 for temperature (−20 to 130 °C range).
- Three relay contact outputs (SPDT 1c, 250 V AC / 30 V DC, 3 A): R1/R2 upper/lower alarm or hold; FAIL alarm.
- Contact input (no-voltage a-contact) for external transmission hold; RS-485 2-wire isolated communication.
- Optional converter and sensor combination calibration service (temperature sensor offset calibration included).
- IP65 (IEC60529 / JIS C0920); pole (50 A) or wall mount; aluminium alloy housing; SUS304 fittings and hood; reflective monochrome LCD.
- CE marked: EN61326-1 Class A, EN61010-1, RoHS EN50581; FCC Part 15 Class A.
Applications
The HE-200R is suited to continuous resistivity monitoring in ultrapure water production and distribution systems, semiconductor fab process water management, pharmaceutical WFI and purified water loops, boiler feed water, and any high-purity water application where accurate resistivity measurement with minimal temperature-induced error is critical.
Installation and Safety Notes
Mount on a 50 A pole or wall. Power: 100–240 V AC ±10%, 50/60 Hz, 15 VA max. When sensor, transmission, or contact input cables are extended to 30 m or more, the CE marking surge test does not apply — fit appropriate surge absorption elements on all connection lines. An internal arrester (spark-over voltage 400 V) is provided for transmission output, contact input, and communication terminals. Operating temperature: −20 to 55 °C; storage: −25 to 65 °C; humidity: 5–90% RH non-condensing.
Technical Specifications
| Parameter | Resistivity, Temperature |
| Measurement method | 2-electrode resistivity (ERF-001 Series, cell const. 0.01 /cm) |
| Resistivity range | 0.000–2.000 MΩ·cm / 0.00–20.00 MΩ·cm; 0.00–20.00 kΩ·cm / 0.0–200.0 kΩ·cm; display up to 100.0 MΩ·cm (no temp. comp.) |
| Temperature range | 0–100 °C (display −10 to 110 °C); resolution 0.01 °C |
| Repeatability (resistivity) | Within ±0.1% FS |
| Linearity (resistivity) | Within ±0.5% FS |
| Repeatability / Linearity (temperature) | ±0.1 °C / ±0.5 °C |
| UPW standard resistivity input | 18.23 / 18.18 / 18.24 MΩ·cm; 182.3 / 181.8 / 182.4 kΩ·m (selectable) |
| Clipping function | User-defined ceiling; measured value held at ceiling when exceeded |
| Temperature compensation | NaCl (ref. 5–95 °C) / arbitrary coeff. ±3%/°C (ref. 5–95 °C) / none; auto pure water compensation; Pt 1 kΩ |
| Transmission output | 2 × 4–20 mA DC, isolated; max. 900 Ω; output 1: resistivity (free range); output 2: temperature (−20 to 130 °C) |
| Contact output | 3 × relay SPDT (1c); 250 V AC / 30 V DC, 3 A; R1/R2: upper/lower alarm or hold; FAIL alarm |
| Contact input | 1 × no-voltage a-contact; external transmission hold |
| Communication | RS-485, 2-wire, isolated from input circuit |
| Calibration | Cell constant coefficient input (resistivity); comparison to reference thermometer (temperature); optional combination calibration service |
| Power supply | 100–240 V AC ±10%, 50/60 Hz, 15 VA max. |
| Operating temperature | −20 °C to 55 °C |
| Storage temperature | −25 °C to 65 °C |
| Humidity | 5–90% RH (non-condensing) |
| Protection rating | IP65 (IEC60529 / JIS C0920) |
| Installation | Pole (50 A) or wall mount; outdoor installation type |
| Housing material | Aluminium alloy; SUS304 fittings and hood; polycarbonate window |
| Display | Reflective monochrome LCD |
| Dimensions (W × H × D) | 180 × 155 × 115 mm (excl. mounting brackets) |
| Weight | Main body approx. 3.5 kg; cover and brackets approx. 1 kg |
| Compliance | CE (EN61326-1 Class A, EN61010-1, RoHS EN50581); FCC Part 15 Class A |
| Manufacturer | HORIBA Advanced Techno Co., Ltd. |
| Brand | Horiba |
