The HE-960R-GC(W) is a panel-mount carbon sensor resistivity meter from HORIBA's semiconductor wet process lineup, designed for rigorous cleaning process management in one-bath cleaning systems. Its 100% carbon electrode sensors (ERF-series GC type) eliminate the risk of metal contamination entirely — compatible with aggressive cleaning solutions including hydrofluoric acid and hydrogen peroxide — making it the ideal resistivity measurement solution where metal-free contact with process liquids is mandatory. Resistivity range 0.000–100.0 MΩ·cm; 24 V DC; 96 × 96 mm DIN panel-mount; panel face IP65.
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HE-960R-GC(W), Carbon Sensor Resistivity Meter for One-Bath Semiconductor Cleaning, HORIBA
HE-960R-GC(W)
Horiba
The HE-960R-GC(W) is a carbon sensor resistivity meter from HORIBA's semiconductor wet process lineup, designed specifically for cleaning process management in one-bath cleaning systems. Its defining feature is the use of ERF-series GC sensors with 100% carbon electrodes — completely metal-free — which eliminates all risk of metal contamination even when the sensor is immersed in aggressive cleaning solutions such as hydrofluoric acid (HF) or hydrogen peroxide (H₂O₂). This makes the HE-960R-GC(W) uniquely suited to applications where conventional metal-electrode sensors cannot be used without risk of introducing metallic impurities into the process. Flexible temperature compensation options — pure water, ultrapure water with impurities, and user-defined — allow the instrument to be precisely tailored to the specific liquid being measured. Powered by 24 V DC and housed in a 96 × 96 mm DIN panel-mount enclosure with an IP65-rated panel face.
Key Features HE-960R-GC(W)
- 100% carbon electrode sensors (ERF-series GC type) — completely metal-free; no risk of metal contamination in aggressive cleaning process liquids.
- Compatible with hydrofluoric acid (HF), hydrogen peroxide (H₂O₂), and a wide range of semiconductor cleaning solutions — excellent chemical resistance.
- Resistivity range 0.000–0.200 / 0.00–2.00 / 0.00–20.00 / 0.0–100.0 MΩ·cm — covers ultrapure rinse water through process cleaning conditions.
- Abundant temperature compensation: pure water, UPW with impurities, or user-defined — selectable per measured liquid.
- Transmission output and contact output for process integration and alarm functions.
- 24 V DC, 5 W max — native semiconductor fab DC power infrastructure.
- 96 × 96 mm DIN panel-mount; panel face IP65 (IEC60529 / JIS C0920); approx. 500 g.
- CE marked; FCC Part 15.
Applications
The HE-960R-GC(W) is suited to resistivity monitoring in semiconductor one-bath cleaning systems — particularly where the cleaning bath contains HF, H₂O₂, or other chemicals incompatible with metal electrodes — as well as rinse water purity monitoring and cleaning endpoint detection in precision semiconductor and advanced electronics manufacturing processes.
Installation and Safety Notes
Install into a standard 96 × 96 mm panel cutout. Power: 24 V DC, 5 W max. Use only with compatible ERF-series GC carbon sensors. Panel face IP65. Consult the product catalog for full wiring, output, and installation specifications.
Technical Specifications
| Parameter | Resistivity, Temperature |
| Measurement method | 2-electrode resistivity (carbon sensor, ERF-series GC type) |
| Compatible sensors | ERF-series specific resistance GC sensors (100% carbon electrodes) |
| Resistivity range | 0.000–0.200 / 0.00–2.00 / 0.00–20.00 / 0.0–100.0 MΩ·cm |
| Temperature compensation | Pure water / UPW with impurities / user-defined |
| Transmission output | Available (details in catalog) |
| Contact output | Available (details in catalog) |
| Power supply | 24 V DC, 5 W max. |
| Protection rating | Panel face IP65 (IEC60529 / JIS C0920) |
| Installation type | Indoor panel-mount (DIN 96×96 mm); semiconductor wet process |
| Dimensions (W × H × D) | 96 × 96 × 115 mm (case depth approx. 105 mm) |
| Weight | Approx. 500 g |
| Compliance | CE marked; FCC Part 15 |
| Manufacturer | HORIBA Advanced Techno Co., Ltd. |
| Brand | Horiba |
