The HE-480R(W) is a panel-mount resistivity meter from HORIBA's semiconductor wet process lineup, designed for high-precision monitoring of ultrapure water purity in semiconductor cleaning processes — including final rinse water quality for silicon wafers. Powered by 24 V DC and compatible with ERF Series sensors (cell constant 0.01 /cm), it uses a microprocessor to calculate temperature compensation coefficients based on ultrapure water characteristics and automatically converts measured values to 25 °C reference resistivity. A single isolated 4–20 mA output and two relay contact outputs support process integration and alarm functions.
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HE-480R(W), Resistivity Meter for Semiconductor Cleaning Processes, HORIBA
HE-480R(W)
Horiba
The HE-480R(W) is a panel-mount resistivity meter from HORIBA's semiconductor wet process lineup, purpose-built for accurate purity monitoring of ultrapure water used in semiconductor cleaning processes — including final rinse water for silicon wafers and other precision substrates. Powered by 24 V DC, it integrates seamlessly into semiconductor fab infrastructure without requiring AC power wiring. A microprocessor calculates the temperature compensation coefficient based on ultrapure water temperature characteristics and automatically converts the measured value to the 25 °C reference resistivity, delivering high-precision results across the full 0–100 °C compensation range. Compatible with ERF Series flow-through resistivity sensors (cell constant 0.01 /cm).
Key Features HE-480R(W)
- Microprocessor-based temperature compensation using ultrapure water temperature characteristics (ref. 25 °C) — automatic conversion to 25 °C resistivity value.
- High-precision Pt 1 kΩ temperature sensor — accurate compensation across 0–100 °C.
- Three temperature compensation options: extra DI water characteristics (ref. 25 °C), user-defined coefficient (ref. 5–95 °C), or none.
- Resistivity range 0–20.00 MΩ·cm / 0–200.0 kΩ·cm; without temperature compensation: display up to 100.0 MΩ·cm.
- Single isolated 4–20 mA DC output (max. 900 Ω); free range setting; previous value / optional value / continuous hold.
- Two relay contact outputs (SPDT 1c, 240 V AC / 30 V DC, 3 A): R1/R2 selectable as upper/lower alarm, ON/OFF control, or maintenance.
- 24 V DC power supply — native semiconductor fab infrastructure compatibility.
- 48 × 96 mm DIN panel-mount format; panel face IP65; compact and easy to integrate.
Applications
The HE-480R(W) is suited to continuous ultrapure water purity monitoring in semiconductor wet cleaning processes — particularly final rinse water for silicon wafers — as well as process water quality control in semiconductor and electronics manufacturing facilities where 24 V DC panel instrumentation is standard.
Installation and Safety Notes
Install into a standard 48 × 96 mm panel cutout. Power: 24 V DC. Use only with compatible ERF Series resistivity sensors (cell const. 0.01 /cm). Panel face IP65. Consult the product catalog for full wiring and installation details.
Technical Specifications
| Parameter | Resistivity, Temperature |
| Measurement method | 2-electrode resistivity (ERF Series, cell const. 0.01 /cm) |
| Resistivity range | 0–0.200 / 0–2.00 / 0–20.00 MΩ·cm; 0–2.00 / 0–20.0 / 0–200.0 kΩ·m; up to 100.0 MΩ·cm (no temp. comp.) |
| Temperature range | 0–100 °C; resolution selectable (0, 1, or 2 decimal places) |
| Repeatability / Linearity (resistivity) | Within ±0.5% FS |
| Temperature compensation | Extra DI water (ref. 25 °C) / user-defined coefficient (ref. 5–95 °C) / none; Pt 1 kΩ; 0–100 °C |
| Transmission output | 1 × 4–20 mA DC, isolated; max. 900 Ω; free range setting |
| Contact output | 2 × relay SPDT (1c); 240 V AC / 30 V DC, 3 A; upper/lower alarm, ON/OFF control, maintenance |
| Power supply | 24 V DC |
| Protection rating | Panel face IP65 (IEC60529 / JIS C0920) |
| Installation type | Indoor panel-mount (DIN 48×96 mm); semiconductor wet process |
| Dimensions (W × H × D) | 48 × 96 × 115 mm (case depth approx. 105 mm) |
| Weight | Approx. 400 g |
| Compliance | CE marked; FCC Part 15 |
| Manufacturer | HORIBA Advanced Techno Co., Ltd. |
| Brand | Horiba |
