The HD-960L is a dissolved oxygen monitor from HORIBA's semiconductor wet process lineup, designed for continuous DO measurement in hydrofluoric acid (HF) solutions and pure water during semiconductor wet cleaning and rinsing processes. Featuring automatic three-range switching across 0–200 μg/L, 200–2000 μg/L, and 2.00–20.00 mg/L, it continuously measures at the optimal resolution for each process phase — from ultra-low ppb-level dissolved oxygen in deaerated rinse water to higher mg/L concentrations. Compatible with HF concentrations up to 5000 ppm, capable of low flow rates from 15 mL/min, and equipped with four 4–20 mA outputs, four contact outputs, and RS-485 communication.
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HD-960L, HF Dissolved Oxygen Monitor / Pure Water Dissolved Oxygen Monitor for Semiconductor Wet Processes, HORIBA
HD-960L
Horiba
The HD-960L is a dissolved oxygen monitor from HORIBA's semiconductor wet process lineup, purpose-built for continuous DO measurement in hydrofluoric acid (HF) cleaning solutions and pure water rinse streams during semiconductor wet processes. A key feature is its automatic three-range switching function: the instrument continuously selects from three measurement ranges — 0–200 μg/L, 200–2000 μg/L, and 2.00–20.00 mg/L — to always measure at the optimal resolution for the current DO concentration, regardless of whether the process is in a high-concentration cleaning phase or a low-concentration pure water rinsing phase. The flow-through design accommodates very low sample flow rates from 15 mL/min, making it suitable for low-volume or restricted-flow sample lines common in semiconductor process piping. Chemical resistance is provided for HF concentrations up to 5000 ppm. Simple zero calibration for electrical output and zero/span calibration for gas are supported. Four isolated 4–20 mA outputs, four contact outputs, and RS-485 communication support integration into fab automation systems.
Key Features HD-960L
- Automatic 3-range switching: 0–200 μg/L → 200–2000 μg/L → 2.00–20.00 mg/L — optimal resolution at every DO concentration level, μg/L to mg/L order, without manual range selection.
- Compatible with HF solutions up to 5000 ppm — suitable for wet cleaning process streams containing hydrofluoric acid.
- Low sample flow rate capability: 15–200 mL/min at 0–0.1 MPa — suited to low-volume semiconductor process lines.
- Repeatability ±1% FS across all three ranges.
- Four isolated 4–20 mA outputs and four contact outputs for comprehensive process integration and alarm functions.
- RS-485 communication for fab automation and SCADA integration.
- Simple calibration: zero calibration (electrical) and zero/span calibration (gas).
- Flow-through cell with 1/4" tube inlet/outlet connections.
- 24 V DC ±10%, 15 W — native semiconductor fab DC power infrastructure.
- Sensor unit DO-100; sensor #5600.
Applications
The HD-960L is suited to continuous DO monitoring in semiconductor wet cleaning processes — including HF solution baths (0–5000 ppm HF) and pure water rinse lines — where automatic μg/L-to-mg/L range switching enables a single instrument to cover the full DO concentration range from ultra-low dissolved oxygen in deaerated rinse water through to higher concentrations in process chemical streams.
Installation and Safety Notes
Power: 24 V DC ±10%, 15 W. Sample flow rate: 15–200 mL/min; pressure 0–0.1 MPa; temperature 10–45 °C. HF compatibility up to 5000 ppm. Connect via 1/4" tube fittings. Consult the product catalog for full installation and wiring specifications.
Technical Specifications
| Parameter | Dissolved Oxygen (DO) |
| Application | HF solutions (0–5000 ppm HF); pure water — semiconductor wet processes |
| Measurement ranges (auto-switching) | Range 1: 0.0–200.0 μg/L; Range 2: 200–2000 μg/L; Range 3: 2.00–20.00 mg/L |
| Repeatability | ±1% FS (all ranges) |
| Sample pressure | 0–0.1 MPa |
| Sample flow rate | 15–200 mL/min |
| Sample temperature | 10–45 °C |
| HF compatibility | 0–5000 ppm HF |
| Sensor unit / sensor | DO-100 / #5600 |
| Sample inlet/outlet | 1/4" tube |
| Transmission output | 4 × 4–20 mA |
| Contact output | 4 points |
| Communication | RS-485 |
| Calibration | Zero calibration (electrical); zero/span calibration (gas) |
| Power supply | 24 V DC ±10%, 15 W |
| Manufacturer | HORIBA Advanced Techno Co., Ltd. |
| Brand | Horiba |
