CS-900F, Fiber-Optic Type Non-Contact Chemical Concentration Monitor, HORIBA

The CS-900F is the flagship model of HORIBA's CS Series chemical concentration monitors for semiconductor wet processes. Its defining feature is a fully non-contact measurement method: the compact cell unit is simply mounted onto existing PFA piping, and light is transmitted through the pipe wall via fiber-optic cables — the process liquid is never contacted by any part of the measurement system. This approach eliminates the risk of chemical leakage, cross-contamination, and particle generation from wetted sensor components. Absorption spectroscopy with temperature compensation multivariate analysis enables simultaneous multi-component concentration determination — such as NH₃ and H₂O₂ in APM (Ammonia/Peroxide Mixture) cleaning solutions — directly in the high-temperature process stream (20–80 °C) without any pretreatment. Compared to previous models, the CS-900F offers approximately 60% smaller cell unit volume (reduced susceptibility to external disturbances), a wavelength range approximately three times wider (supporting a broader range of wet process chemicals), and an extended light source lifetime of 5 years. The separation of the main unit and cell unit via fiber-optic cable allows flexible installation in equipment with limited space.

Key Features CS-900F

• Non-contact measurement — cell unit mounts onto PFA piping; no contact with process liquid; eliminates chemical leakage, contamination, and particle generation risk.
• Fiber-optic design: main unit and cell unit separated by standard 5 m fiber-optic cable (bend radius R150 mm) — flexible installation in tight spaces.
• ~60% smaller cell unit vs previous models — reduced susceptibility to external disturbances; compact integration into customer equipment.
• Wavelength range ~3× wider than previous models — supports a broader variety of semiconductor wet process chemicals.
• High-temperature measurement: sample temperature 20–80 °C without pretreatment — direct in-process monitoring of hot cleaning solutions.
• Simultaneous multi-component concentration measurement via absorption spectroscopy with temperature compensation multivariate analysis.
• Measurement interval approx. 5 s; 16-point moving average for stable readings.
• Compatible with 1" and 3/4" PFA tubing (clear, non-anti-static type; pipe surface must be free of scratches, dents, or cloudiness).
• 5-year light source lifetime — significantly reduced maintenance frequency.
• 24 V DC power; 4–20 mA transmission output; contact output; RS-232C communication.

Applications

The CS-900F is suited to real-time concentration monitoring of NH₃/H₂O₂ (APM), and other multi-component wet process chemicals in semiconductor cleaning and etching processes — particularly where non-contact measurement is required to prevent chemical contamination, reduce leakage risk, and enable direct monitoring of high-temperature process solutions without sampling or pretreatment.

Installation and Safety Notes

Mount cell unit onto clear PFA tubing (1" or 3/4"; surface must be free of scratches, dents, and cloudiness; avoid anti-static black PFA). Main unit installation inclination: within ±1°. Sample pressure <0.4 MPa (G); pressure fluctuation within 0.02 MPa — if measured at different pressure from background correction, perform zero-point correction. Atmospheric and sample temperature fluctuation must be within ±1 °C/hour. Avoid air bubbles in the PFA tubing — ensure sample flows to prevent bubble retention. Power: 24 V DC, ~40 W (excluding start-up transient). Fiber-optic cable: standard 5 m, bend radius R150 mm.

Technical Specifications